Light Sources

UV, DUV and Mid UV light sources for improved print resolution — available on all Canon Mask Aligners.

Light Sources & Print Resolution

Our Company introduces aligners with any of a variety of light sources, e.g.:

UV, DUV and Mid UV. Much improved Print Resolution is possible.

Printing Resolution:

Light Source	Wavelength	Resolution
Near UV	350-450nm	.6 micron
Mid-UV	280-310nm	.4 micron
DUV	220-260nm	.2 micron in Hard Contact

Output Intensity:

Configuration	Wavelength	Output
UV 250W	365nm - 405nm	13 mw/cm2
350 Watt Near UV	365nm	25-30mW/cm2
350 Watt Near UV	400nm	40-50mW/cm2
500 Watt Near UV	365nm	35-40mW/cm2
500 Watt Near UV	400nm	60-70mW/cm2
500 Watt Near UV/DUV	220nm	10-12mW/cm2
500 Watt Near UV/DUV	254nm	12-14mW/cm2
500 Watt Near UV/DUV	365nm	35-40mW/cm2
500 Watt Near UV/DUV	400nm	40-50mW/cm2

Need Help Choosing the Right Light Source?

Our engineers will help you select the best UV configuration for your specific process requirements. Contact us today.

Specialized in refurbished Canon Proximity/Contact Mask Aligners for the semiconductor industry. Delivering precision, quality, and reliable support since 1989.

Phone

408-234-3359

Email

lev@lvservice.com

Address

Located in Silicon Valley, California.