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Features

Canon PLA-501/600 series — technical specifications and capabilities at a glance.

Canon PLA-501/600 Features

  • Fiber Optic Illumination viewing optics with this 150 Watt Illumination System
  • High Resolution Video
  • Wafer Sizes: 2" to 6" Semi Spec, Pieces, Squares
  • Wafer Feed: Manual and/or Cassette to Cassette Auto Feeder
  • Alignment: Manual / Automatic
  • UV Power: 250, 350, 500 Watts, 1 and 1.5 Kilo Watts
  • UV Spectrum: Deep UV, NEAR Deep UV, Near UV
  • Resolution: Less Than .4um in Hard Contact

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Specialized in refurbished Canon Proximity/Contact Mask Aligners for the semiconductor industry. Delivering precision, quality, and reliable support since 1989.

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