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Products >> Features |
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| Canon PLA 501/600 Features |
- Contact/Proximity Alignment
- Fiber Optic Illumination viewing optics with this 150 Watt Illumination System
- High Resolution Video
- Wafer Sizes: 2" to 6" Semi Spec, Pieces, Squares
- Wafer Feed: Manual and/or Cassette to Cassette Auto Feeder
- Alignment: Manual / Automatic
- UV Power: 250, 350, 500 Watts, 1 and 1.5 Kilo Watts
- UV Spectrum: Deep UV, NEAR Deep UV, Near UV
Resolution: Less Than .4um in Hard Contact
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